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A micromachined finite coplanar line-to-silicon micromachined waveguide transition for millimeter and submillimeter wave applications

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4 Author(s)
Yongshik Lee ; Radiat. Lab., Michigan Univ., Ann Arbor, MI, USA ; Becker, J.P. ; East, J.R. ; Katehi, L.P.B.

A finite ground coplanar (FGC) line-to-waveguide transition utilizing a novel, free-standing printed E-plane probe has been demonstrated in W-band (75-110 GHz). One way to improve the performance of such a transition and to extend its utility well into the submillimeter range is to thin the supporting substrate beneath the probe. This paper presents the W-band performance of a fully micromachined finite ground coplanar line-to-silicon diamond waveguide transition with the substrate beneath the probe entirely removed, thus forming a free-standing metal structure.

Published in:

Microwave Symposium Digest, 2002 IEEE MTT-S International  (Volume:3 )

Date of Conference:

2-7 June 2002

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