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Circuit internal test techniques working in a contactless manner are necessary for failure analysis and design verification of high-speed and high-frequency circuits. A relative new technique is the scanning probe voltage measurement technique, a technique which is based on scanning probe microscopy. This paper gives an overview of the state-of-the-art of this technique and demonstrates some practical examples.
Microwave Symposium Digest, 2002 IEEE MTT-S International (Volume:3 )
Date of Conference: 2-7 June 2002