By Topic

Contactless probing of high-frequency electrical signals with scanning probe microscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Merlin, W. ; Inst. of Mater. for Electr. Eng., Gerhard Mercator Univ., Duisburg, Germany

Circuit internal test techniques working in a contactless manner are necessary for failure analysis and design verification of high-speed and high-frequency circuits. A relative new technique is the scanning probe voltage measurement technique, a technique which is based on scanning probe microscopy. This paper gives an overview of the state-of-the-art of this technique and demonstrates some practical examples.

Published in:

Microwave Symposium Digest, 2002 IEEE MTT-S International  (Volume:3 )

Date of Conference:

2-7 June 2002