Referenced Items are not available for this document.
In order to meet high expectations on yield targets, quick identification of root cause for yield loss is essential. Decision trees are shown to be a powerful data mining tool for integrated circuit yield improvement. Several case studies from yield improvement efforts on real products have been presented.
Published in:
Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop
Date of Conference: 2002
- Page(s):
- 262 - 265
- Print ISBN:
- 0-7803-7158-5
- INSPEC Accession Number:
- 7374258
- Digital Object Identifier :
- 10.1109/ASMC.2002.1001615
- Product Type:
- Conference Publications
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