Referenced Items are not available for this document.
Graphene nanoribbon (GNR) interconnects are fabricated, and the extracted resistivity is compared to that of Cu. It is found that the average resistivity at a given linewidth(18 nm < W< 52 nm) is about three times that of a Cu wire, whereas the best GNR has a resistivity that is comparable to that of Cu. The conductivity is found to be limited by impurity scattering as well as line-edge roughness scattering; as a result, the best reported GNR resistivity is three times the limit imposed by substrate phonon scattering. This letter reveals that even moderate-quality graphene nanowires have the potential to outperform Cu for use as on-chip interconnects.
Published in:
Electron Device Letters, IEEE
(Volume:30
,
Issue:
6
)
Date of Publication: June 2009
- Page(s):
- 611 - 613
- ISSN :
- 0741-3106
- INSPEC Accession Number:
- 10666151
- Digital Object Identifier :
- 10.1109/LED.2009.2020182
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 26 May 2009
- Issue Date :
- June 2009
- Sponsored by :
- IEEE Electron Devices Society
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