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A yield enhancement methodology for launching new technologies

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2 Author(s)
Huang, J. ; IBM Corp., Hopewell Junction, NY, USA ; Franca, D.

A traditional Pareto chart can be misleading if an overall yield is low. The traditional reject Pareto chart weights heavily for rejects at the front end of line. In order to address the shortcoming, we introduce a new final yield impact Pareto chart, which provides us with much accurate yield loss information to identify yield improvement projects. Furthermore, when we prioritize and allocate the resources for yield improvement projects, we must also consider some other important constraints. A matrix similar to a FMEA matrix is introduced to consider all constraints for prioritizing yield improvement projects.

Published in:

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Date of Conference:

13-15 Sept. 2005