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Microelectromechanical systems (MEMS) include a whole class of devices built at the microscale that couple mechanical motion to electrical signals, and vice versa. These include sensors, actuators, and resonators. NEMS is the nanoscale equivalent of MEMS, namely, nanoelectromechanical systems. NEMS provide several advantages over MEMS for certain applications, including higher frequencies and better accuracy.
In this tutorial Dr. Tsakalakos discusses the materials and fabrication techniques for MEMS and related topics including microfluidics, electromechanics, MEMS sensors and actuators, polymer-based MEMS, and issues related to design and scaling, characterization and testing and packaging. He also reviews NEMS fabrication techniques and the advantages of NEMS as compared to MEMS.