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Simple cost models of high-process-mix wafer fabs at different capacities

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2 Author(s)
Iwata, Y.. ; Manuf. Syst. Technol. Dept., Hitachi Ltd., Ibaraki, Japan ; Wood, S.C.

A simple equation-based model of wafer cost as a function of fab capacity is derived by splitting fixed costs into capacity-dependent and capacity-independent components. Simple approximations are presented for these terms. Our model uses Sematech data to show how the following phenomena can be measured: 1) increasing process diversity motivates larger fabs; 2) dedicating tools to eliminate setups motivates larger fabs; 3) slow, cheap, versatile tools are better than fast, expensive, dedicated tools when implementing flexible minifabs

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:15 ,  Issue: 2 )