Referenced Items are not available for this document.
We fabricated a refractive semiconductor micro-lenses using a focused ion beam (FIB) direct writing technique. The simple one-step FIB process produced high-quality micro-lenses of silicon, the most popular and low cost semiconductor material used in optoelectronics. A spherical Si microlens with a nominal lens diameter of 48 μm exhibited a radius curvature and focal length of 100 and 40 μm, respectively. The maximum derivation between the measured and designed profiles is less than λ/100. The surface roughness, RMS, measured by use of atomic force microscope in 1× 1 μm2 square area, is 1.1 nm. This microlens fabrication method could be readily applicable due to the simplicity in processing and the high-quality results
Published in:
Semiconductor Manufacturing, IEEE Transactions on
(Volume:15
,
Issue:
2
)
Date of Publication: May 2002
- Page(s):
- 229 - 231
- ISSN :
- 0894-6507
- INSPEC Accession Number:
- 7266338
- Digital Object Identifier :
- 10.1109/66.999597
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 August 2002
- Issue Date :
- May 2002
- Sponsored by :
- IEEE Components, Packaging and Manufacturing Technology Society
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
