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In the millimeter wave (26-40 GHz) region, a combination of new technologies, such as MMIC amplifiers and equalizers together with miniature TWTs, have resulted in the millimeter wave power module (MMPM) which produces record power densities at low cost. These same advantages can be extended to higher frequencies by frequency multiplying the output of the MMPM using nonlinear solid state devices and quasi-optical power combining. The resulting high power millimeter wave sources offer dramatic savings in size, weight and cost as compared to conventional coupled-cavity TWT sources. A quasi-optical frequency multiplier grid array consists of thousands of varactor devices and antennas on a single wafer. This approach is extremely attractive because of its low fabrication cost, small-size realization and graceful degradation qualities. The goal of this research is a high power source using an MMPM to drive frequency multiplier grid arrays. This hybrid technology source will provide Watt-level CW output power up to 200 GHz.