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Accurate and efficient design of experiment for reliability assessment. Application to a 20 Å gate oxide

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7 Author(s)
F. Monsieur ; Central R&D Labs., STMicroelectronics, Crolles, France ; E. Vincent ; D. Roy ; S. Bruyere
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This paper provides a complete understanding of the experimental error origins and the way it is propagated in the oxide lifetime projection procedure. As a result the experimental error is controlled and can be optimized. Therefore accuracy well below the 5% threshold is easily achieved

Published in:

Integrated Reliability Workshop Final Report, 2001. 2001 IEEE International

Date of Conference:

2001