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Research and development of production control information system tool

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2 Author(s)
Ishii, Y. ; Fujitsu AMD Semicond. Ltd., Aizuwakamatsu City, Japan ; Watanabe, S.

It is necessary to obtain some types of information in real time to follow a production plan. To select necessary information, we created a production control business flow. As a result, we found out that there were two types of information that were necessary for production control. The information of first type is that of the difference between each planned stage move and actual stage move. As shown by the business flow, it is important to check the difference between the planned move and the actual move in real time and take quick action. The information of the second type is that of the causes of such difference, especially status information of the constraint equipment. We have established and operated a system that enables us to obtain such types of information and to take quick action to reduce the difference before the problem becomes serious.

Published in:

Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on

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