Referenced Items are not available for this document.
The enormous complexity of a semiconductor manufacturing system is the main obstacle for making quality manufacturing control decisions. Conventional methodologies, such as queueing network and simulation analysis, are often too complex to be used effectively. In this paper, we will demonstrate a methodology to build simple statistical models that faithfully characterize the manufacturing system. We then show how these models can help improve the quality of manufacturing control decisions
Published in:
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Date of Conference: 2000
- Page(s):
- 335 - 338
- Meeting Date :
- 26 Sep 2000-28 Sep 2000
- ISSN :
- 1523-553X
- Print ISBN:
- 0-7803-7392-8
- INSPEC Accession Number:
- 7342192
- Conference Location :
- Tokyo
- Digital Object Identifier :
- 10.1109/ISSM.2000.993681
- Product Type:
- Conference Publications
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
