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Optomechanical uncooled infrared imaging system: design, microfabrication, and performance

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7 Author(s)
Yang Zhao ; Dept. of Mech. Eng., California Univ., Berkeley, CA, USA ; Minyao Mao ; Horowitz, R. ; Majumdar, A.
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This paper presents the design, fabrication and performance of an uncooled micro-optomechanical infrared (IR) imaging system consisting of a focal-plane array (FPA) containing bi-material cantilever pixels made of silicon nitride (SiNx) and gold (Au), which serve as infrared absorbers and thermomechanical transducers. Based on wave optics, a visible optical readout system is designed to simultaneously measure the deflections of all the cantilever beams in the FPA and project the visible deflection map onto a visible charge-coupled device (CCD) imager. The IR imaging results suggest that the detection resolution of current design is 3-5 K, whereas noise analysis indicates the current resolution to be around 1 K. The noise analysis also shows that the theoretical noise-equivalent temperature difference (NETD) of the system can be below 3 mK

Published in:

Microelectromechanical Systems, Journal of  (Volume:11 ,  Issue: 2 )

Date of Publication:

Apr 2002

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