Referenced Items are not available for this document.
MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.
Published in:
Electron Device Letters, IEEE
(Volume:23
,
Issue:
4
)
Date of Publication: April 2002
- Page(s):
- 182 - 184
- ISSN :
- 0741-3106
- INSPEC Accession Number:
- 7234919
- Digital Object Identifier :
- 10.1109/55.992832
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 August 2002
- Issue Date :
- April 2002
- Sponsored by :
- IEEE Electron Devices Society
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