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Study of PZT coated membrane structures for micromachined ultrasonic transducers [medical imaging]

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10 Author(s)
Muralt, P. ; Ceramics Lab., Swiss Fed. Inst. of Technol., Lausanne, Switzerland ; Schmitt, D. ; Ledermann, N. ; Baborowski, J.
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Test structures for piezoelectric micromachined ultrasonic transducers have been fabricated and investigated. The basic element consists of a silicon membrane coated with a (100) textured Pb(ZrTi)O 3 (PZT) thin film deposited by sol-gel techniques. Dense and (100)-textured PZT films are obtained up to a thickness of 4 μm. Cantilever and membrane test structures were simulated by finite element analysis (FEA). Characteristic material properties have been derived comparing experimental and simulation results. The findings are used to optimize a transducer design for medical imaging in the range of 5 MHz

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Ultrasonics Symposium, 2001 IEEE  (Volume:2 )

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