By Topic

Vibration mode analysis of RF film bulk acoustic wave resonator using finite element method

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Jae Ho Jung ; Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., Taegu, South Korea ; Yong Hyun Lee ; Lee, Jung Hee ; Hyun Chul Choi

In this paper, the resonant characteristics and modes of the film bulk acoustic wave resonator (FBAR) used in a few of GHz frequency region have been analyzed by its impedance analysis using the finite element method. These characteristics could be calculated from solving an large eigen value problem formulated by using electromechanical wave equations and its boundary conditions. In particular, the spurious characteristics as well as all resonant modes and mode shapes, considering the effects of electrode area variation, was extracted. From this result, the fact was obtained that the optimum ratio of length and thickness at the simplified resonator structure is 20:1 and the minimum ratio is 5:1 to operate fundamental thickness vibration mode. Then, we compared our results with the simulation data obtained by Mason model analysis and the measured data of the zinc oxide (ZnO) film bulk acoustic wave resonator (FBAR)

Published in:

Ultrasonics Symposium, 2001 IEEE  (Volume:1 )

Date of Conference:

2001