SAW propagation in LiNbO/sub 3/ damaged by E-beam

Measurement results on phase changes of SAW passing through a waveguide structure fabricated on LiNbO/sub 3/ plate by lithography with photoresist patterning by E-beam without any photomask are presented. Discontinuities and hysteresis in the phase versus temperature dependence in nitrogen atmosphere as well as large SAW phase changes (/spl ges/ 180 degrees) as vapors of water containing analyte adsorption on the sample surface have been observed. Qualitative explanation of the results based on the reconstruction of the ferroelectric microdomain structure in E-beam damaged LiNbO/sub 3/ as temperature changes and with the formation of a thin film of water on the sample surface is suggested.