By Topic

SAW propagation in LiNbO3 damaged by E-beam

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
R. G. Kryshtal ; Inst. of Radio Eng. & Electron., Acad. of Sci., Fryazino, Russia ; A. V. Medved

Measurement results on phase changes of SAW passing through a waveguide structure fabricated on LiNbO3 plate by lithography with photoresist patterning by E-beam without any photomask are presented. Discontinuities and hysteresis in the phase versus temperature dependence in nitrogen atmosphere as well as large SAW phase changes (⩾ 180 degrees) as vapors of water containing analyte adsorption on the sample surface have been observed. Qualitative explanation of the results based on the reconstruction of the ferroelectric microdomain structure in E-beam damaged LiNbO3 as temperature changes and with the formation of a thin film of water on the sample surface is suggested

Published in:

Ultrasonics Symposium, 2001 IEEE  (Volume:1 )

Date of Conference:

2001