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Modelling of shear-horizontal-type surface acoustic waves and its application to COM-based device simulation

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3 Author(s)
Hashimoto, Ken-Ya ; Dept. of Electron. & Mech. Eng., Chiba Univ., Japan ; Omori, Tatsuya ; Yamaguchi, Masatsune

Describes a simple technique for the simulation of devices employing highly piezoelectric shear-horizontal (SH) type surface acoustic waves (SAWs). First, propagation and excitation characteristics of the SH-type SAWs are modelled by the application of Plessky's COM model and its extension by Koskela et al. to the discrete Green function theory. Parameters appearing in the model are determined by the numerical fitting with the rigorous numerical analysis. Then a generalised procedure is presented to derive COM equations of a conventional form from the modelled SH-type SAW propagation and excitation characteristics. Finally, the frequency response of a resonator is discussed based on the derived COM equations, showing how effectively the present technique is applied to device simulation

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Ultrasonics Symposium, 2001 IEEE  (Volume:1 )

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