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Optical MEMS devices based on moving waveguides

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1 Author(s)
Ollier, E. ; Lab d''Electron. et de Technol. de l''Inf., CEA, Centre d''Etudes Nucleaires de Grenoble, France

The paper deals with optical microelectromechanical systems (MEMS), and in particular with optical MEMS based on moving waveguides. After a short overview of this very attractive novel activity, specific technological problems and solutions are discussed. Then the following examples of recent developments based on silica on silicon technology are presented: optical switch, vibration sensor, and optical scanner

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:8 ,  Issue: 1 )