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MEMS and Si micromachined circuits for high-frequency applications

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3 Author(s)
Katehi, L.P.B. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Harvey, J.F. ; Brown, Elliott

RF micromachining and microelectromechanical structure (MEMS) technology promise to provide an innovative approach in the development of effective and low-cost circuits and systems. This technology is expected to have significant application in the development of low-cost antenna arrays and reconfigurable apertures, due to its potential to support novel systems architectures. This paper presents a brief history and the state-of-the-art in the development of RF MEMS devices, with primary emphasis on switches and Si-micromachined circuit components for use in high-performance high-density on-wafer packaged circuits

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:50 ,  Issue: 3 )