Cart (Loading....) | Create Account
Close category search window

Mechanical properties of MEMS materials

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Sharpe, W.N., Jr. ; Dept. of Mech. Eng., Johns Hopkins Univ., Baltimore, MD, USA

MEMS use materials such as polysilicon, which have been extensively characterized as to their electrical properties but not for their mechanical properties. The properties of aluminum are of course well known, but not for freestanding thin films. In a very real sense, the materials used in MEMS are new materials and require novel test methods. One cannot simply cut out a specimen and place it in a test machine; one must design the specimen to be attached to the substrate at some point yet free to deform. Measuring the small forces and displacements is a challenge, and it is particularly difficult to measure strain at the micro scale

Published in:

Semiconductor Device Research Symposium, 2001 International

Date of Conference:


Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.