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Fabrication of self-organized carbon nanotubes on si substrates using nano-template by flame synthesis technique

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4 Author(s)
Zhi Chen ; University of Kentucky ; Hu, Wenchong ; Yuan, Liming ; Saito, Kozo

We present the successful fabrication, for the first time, of highly ordered C nanotube arrays on a silicon substrate using an anodized Al2O3 template by the flame synthesis method. This demonstrated the possibility for integration of carbon nanotube-based devices with Si integrated circuits

Published in:

Semiconductor Device Research Symposium, 2001 International

Date of Conference:

5-7 Dec. 2001

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