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CVD polycrystalline diamond high-Q micromechanical resonators

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4 Author(s)
Jing Wang ; Center for Integrated Wireless Microsyst., Michigan Univ., Ann Arbor, MI, USA ; Butler, J.E. ; Hsu, D.S.Y. ; Nguyen, T.-C.

Chemical Vapor Deposited (CVD) polycrystalline diamond material, with an acoustic velocity higher than that of polycrystalline silicon, has been utilized as the structural material for clamped-clamped beam (CC-beam) micromechanical resonators with measured resonance frequencies from 2.7 MHz to 9.8 MHz, and Q's up to 6,225-easily on par with that of previous polysilicon resonators in this frequency range. In addition to CC-beams, CVD polydiamond folded-beam /spl mu/mechanical resonators are also demonstrated with Q's in the range of 20,000. With its higher acoustic velocity, polydiamond has great potential for more easily achieving the coveted UHF frequencies (0.3-3 GHz) required for use in wireless communication transceivers.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002