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Micro-power wireless transmitter for high-temperature MEMS sensing and communication applications

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3 Author(s)
Suster, M. ; Dept. of EECS, Case Western Reserve Univ., Cleveland, OH, USA ; Young, D.J. ; Ko, W.H.

A low-power silicon-tunnel-diode-based LC-tuned oscillator transmitter is proposed for high-temperature MEMS sensing and wireless data transmission applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a miniature on-board coil loop serving as the inductor for the LC tank and also a transmitting antenna. The system achieves telemetry performance up to 290/spl deg/C over a distance of 2.5 meters with a total power consumption of 110 /spl mu/W.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002