Micro-power wireless transmitter for high-temperature MEMS sensing and communication applications

A low-power silicon-tunnel-diode-based LC-tuned oscillator transmitter is proposed for high-temperature MEMS sensing and wireless data transmission applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a miniature on-board coil loop serving as the inductor for the LC tank and also a transmitting antenna. The system achieves telemetry performance up to 290/spl deg/C over a distance of 2.5 meters with a total power consumption of 110 /spl mu/W.