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Production of accurate microscale oxygen sensors has been conventionally attempted using amperometric methods, which prove to be difficult to miniaturize, mainly due to the requirement of a bulky reference electrode. This paper details the design and fabrication process for an optically based oxygen sensor using an oxygen-sensitive fluorescent dye combined with microfabricated Cytop/spl trade/ waveguides that are monolithically integrated into the sensing substrate. Application of the dye to the optical waveguides was accomplished using a unique electrostatic layer-by-layer deposition process that has allowed us to deposit ultrathin dye layers to specific areas of the substrate. Testing of the oxygen sensitivity of the immobilized dye was carried out.