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A scanning micromirror with angular comb drive actuation

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6 Author(s)
P. R. Patterson ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Dooyoung Hah ; Hung Nguyen ; H. Toshiyoshi
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Describes a single crystal silicon, 1/spl times/1 mm/sup 2/, scanning micromirror, which incorporates a novel angular vertical comb drive actuator. Results from our model for the angular vertical comb show that a 50% higher scan angle can be achieved when compared to a staggered vertical comb of equivalent dimensions. The simplified, cost effective, silicon on insulator micro-electromechanical systems, (SOI MEMS), process features self-alignment of the fixed and moving teeth and is fabricated on a single SOI wafer. Static deflection for our fabricated device fits well with the model and a resonant mode optical scan angle of /spl plusmn/18/spl deg/ at 1.4 kHz has been measured.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002