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A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

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5 Author(s)
Il-Joo Cho ; Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol. (KAIST), Taejon, South Korea ; Kwang-Seok Yun ; Hyung-kew Lee ; Jun-Bo Yoon
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In this paper, a new micromirror structure has been proposed and fabricated. The proposed micromirror is electromagnetically actuated along two-axis at low voltage using an external magnetic field. The mirror plates and torsion bars are made of bulk silicon and the actuation coils are made of electroplated copper. The maximum deflection angles have been measured as /spl plusmn/4.35/spl deg/ for x-axis actuation and /spl plusmn/15.7/spl deg/ for y-axis actuation. The actuation voltages are below 4.2 V for x-axis actuation and 1.76 V for y-axis actuation, respectively.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002