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Micro-replication of optical lenses in glass using a novel sol gel technology

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3 Author(s)
Sayah, A. ; Inst. of Microsyst., Swiss Fed. Inst. of Technol. Lausanne (EPFL), Switzerland ; Parashar, V.K. ; Gijs, M.A.M.

A new method to realize arrays of microlenses using a sol gel glass replication technology is presented. Polydimethyl-siloxane (PDMS) master structures are used for the replication of thin glass membranes, which, by an appropriate annealing procedure, result in converging lenses with positive meniscus. Hereby, we exploit PDMS - sol gel surface interactions and thickness dependent changes in composition of the sol gel solution. The lenses are realized on a circular and square like basis. We characterize the micro-lenses by an optical imaging system and measure their focal length as a function of lens thickness and size. Also lens interference effects are measured.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002

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