Cart (Loading....) | Create Account
Close category search window
 

A micro lens actuator for optical flying head

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Hata, S. ; Precision & Intelligence Lab., Tokyo Inst. of Technol., Japan ; Yamada, Y. ; Ichihara, J. ; Shimokohbe, A.

In relation to high capacity magneto-optical recording, a new electrostatic actuator, which is called a micro lens actuator (MLA), for an optical flying head (OFH) has been designed and fabricated. The MLA is characterized by its moving electrode made of a Pd-based thin film metallic glass ( Pd/sub 76/Cu/sub 7/Si/sub 17/). Annealing in the supercooled liquid region (SCLR) is adopted for relaxation of internal stress in the moving electrode to fabricate a huge, flat and thin moving electrode plate. The experimental MLA shows 0.85 /spl mu/m/50 V maximum stroke, 0.02 degree tilt error and 3.55 kHz resonance frequency.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.