Referenced Items are not available for this document.
In relation to high capacity magneto-optical recording, a new electrostatic actuator, which is called a micro lens actuator (MLA), for an optical flying head (OFH) has been designed and fabricated. The MLA is characterized by its moving electrode made of a Pd-based thin film metallic glass ( Pd/sub 76/Cu/sub 7/Si/sub 17/). Annealing in the supercooled liquid region (SCLR) is adopted for relaxation of internal stress in the moving electrode to fabricate a huge, flat and thin moving electrode plate. The experimental MLA shows 0.85 /spl mu/m/50 V maximum stroke, 0.02 degree tilt error and 3.55 kHz resonance frequency.
Published in:
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Date of Conference: 24-24 Jan. 2002
- Page(s):
- 507 - 510
- Meeting Date :
- 20 Jan 2002-24 Jan 2002
- ISSN :
- 1084-6999
- Print ISBN:
- 0-7803-7185-2
- INSPEC Accession Number:
- 7327987
- Conference Location :
- Las Vegas, NV, USA
- Digital Object Identifier :
- 10.1109/MEMSYS.2002.984320
- Product Type:
- Conference Publications
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