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A micro lens actuator for optical flying head

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4 Author(s)
Hata, S. ; Precision & Intelligence Lab., Tokyo Inst. of Technol., Japan ; Yamada, Y. ; Ichihara, J. ; Shimokohbe, A.

In relation to high capacity magneto-optical recording, a new electrostatic actuator, which is called a micro lens actuator (MLA), for an optical flying head (OFH) has been designed and fabricated. The MLA is characterized by its moving electrode made of a Pd-based thin film metallic glass ( Pd/sub 76/Cu/sub 7/Si/sub 17/). Annealing in the supercooled liquid region (SCLR) is adopted for relaxation of internal stress in the moving electrode to fabricate a huge, flat and thin moving electrode plate. The experimental MLA shows 0.85 /spl mu/m/50 V maximum stroke, 0.02 degree tilt error and 3.55 kHz resonance frequency.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002

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