By Topic

An integrated micro-optical system for laser-to-fiber active alignment

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
K. Ishikawa ; NSF Center for Adv. Manuf. & Packaging of Microwave, Opt. & Digital Electron., Colorado Univ., Boulder, CO, USA ; Jianglong Zhang ; A. Tuantranont ; V. M. Bright
more authors

We report a new micro-optical system for laser-to-fiber active alignment. An integrated microsystem platform, which has a thermally-actuated micromirror, a silicon etched v-groove and flip-chip bonding pads, is successfully fabricated and actuated for beam adjustment from a vertical-cavity surface-emitting laser (VCSEL) to a fiber. The micromirror has 4.0 degree maximum beam steering angle with the resolution of 0.08 degree/mA. With the steering angle reaching 2.5 degrees, the coupling efficiency improves to 80 % from 9% initial efficiency.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002