By Topic

CMOS single-chip multisensor gas detection system

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Hagleitner, C. ; Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland ; Lange, D. ; Kerness, N. ; Kummer, A.
more authors

We present a novel single-chip smart chemical microsensor system fabricated using industrial CMOS technology and post-CMOS micro machining. It combines three different micromachined transducers (mass-sensitive, capacitive, and calorimetric) all of which rely on polymeric coatings as sensitive layers to detect airborne volatile organic compounds (VOC). A temperature sensor is included to account for the strong temperature dependence of volatile absorption in polymers. Integration of microelectronics and micromechanical components on the same chip allows for controlling of the sensor functions, and enables on-chip signal conditioning that drastically improves the sensor performance. The circuitry includes biasing, amplification, and a serial interface to transmit data to off-chip recording units. The chip forms an integral part of a handheld chemical sensor unit to discriminate and quantify VOC's.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002