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Micro-nanomachining technologies have been studied with the aim of saving energy and natural resources. Wafer process packaging using electrical feedthrough in glass has been applied to micromechanical sensors as electrostatically levitating micro motors (10,000 rpm) for rotational gyroscopes. Maintenance tools as active catheters have been developed to be used in narrow space for extended life. Technologies for compact power source as fabrication of ceramic microstructures using silicon mold and as measurement of hydrogen storage capacity of carbon nanotube were developed.