Referenced Items are not available for this document.
In this paper, we report several advances in the Sugar2.0 MEMS system simulation package, including reduced-order modeling techniques, simple hierarchical description of complex structures, synthesis tools, a variety of models, and a web-based interface. Examples include the modeling of a torsional micromirror with lateral actuators compared to experiment, and the prototyping of a microrobot
Published in:
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Date of Conference: 2002
- Page(s):
- 204 - 209
- Meeting Date :
- 20 Jan 2002-24 Jan 2002
- ISSN :
- 1084-6999
- Print ISBN:
- 0-7803-7185-2
- INSPEC Accession Number:
- 7327914
- Conference Location :
- Las Vegas, NV
- Digital Object Identifier :
- 10.1109/MEMSYS.2002.984240
- Product Type:
- Conference Publications
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