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Addressing the needs of complex MEMS design

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13 Author(s)
J. V. Clark ; Dept. of Appl. Sci. & Technol., California Univ., Berkeley, CA, USA ; D. Bindel ; W. Kao ; E. Zhu
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In this paper, we report several advances in the Sugar2.0 MEMS system simulation package, including reduced-order modeling techniques, simple hierarchical description of complex structures, synthesis tools, a variety of models, and a web-based interface. Examples include the modeling of a torsional micromirror with lateral actuators compared to experiment, and the prototyping of a microrobot.

Published in:

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Date of Conference:

24-24 Jan. 2002