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Analysis of electron transmission properties from EPL membrane masks

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5 Author(s)
Seko, C. ; Frontier Sci. & Technol., Fuji Res. Inst. Corp., Tokyo, Japan ; Hayashi, H. ; Ono, K. ; Iriye, Y.
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Summary form only given. In the present study, we investigate the electron transmission properties in 150-nm thick Si/sub 3/N/sub 4/ membrane masks exposed to high energy (E=100 keV) electrons with the modified electron scattering simulation. We report energy loss spectra and the angular distribution of transmitted electrons and compare the simulation and experimental results. We discuss the effect of temperature in the membrane masks on the shape of the zero-loss energy distribution.

Published in:

Microprocesses and Nanotechnology Conference, 2001 International

Date of Conference:

Oct. 31 2001-Nov. 2 2001