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A nondamaging beam blanking SEM test method and its application to highly integrated devices

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8 Author(s)
Makihara, A. ; Nat. Space Dev. Agency of Japan, Ibaraki, Japan ; Kuboyama, S. ; Matsuda, S. ; Nemoto, N.
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The origin of damage causing radiation in a beam blanking scanning electron micrograph (BBSEM) was identified and removed for single-event upset (SEU) testing. The improved BBSEM was successfully used to locate SEU sensitive areas in highly integrated silicon devices

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Nuclear Science, IEEE Transactions on  (Volume:48 ,  Issue: 6 )