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Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions

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2 Author(s)
Degani, O. ; Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel ; Nemirovsky, Y.

An important design issue of electrostatic torsion actuator is the relative locations of the actuating electrodes, where the bias voltage is applied. These geometrical design parameters affect both the pull-in angle as well as the pull-in voltage. In this paper, a new approximated analytical solution for the pull-in equation of an electrostatic torsion actuator with rectangular plates is derived. The analytical expression is shown to be within 0.1% of the one degree of freedom (1DOF) lumped-element model numerical simulations. Moreover, the analytical expressions are compared with the full coupled-domain finite-elements/boundary-elements (FEM/BEM) simulations provided by MEMCAD4.8 Co-solve tool, showing excellent agreement. The approach presented here provides better physical insight, more rapid simulations and an improved design optimization tool for the actuator

Published in:

Microelectromechanical Systems, Journal of  (Volume:11 ,  Issue: 1 )