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A novel electrostatically driven bulk-micromachined on-off optical switch

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5 Author(s)
Cong-Shun Wang ; Dept. of Mech. & Eng. Sci., Peking Univ., Beijing, China ; Jing Fang ; Sheng Chang ; Zhen-Chuan Yang
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In this paper, a novel bulk micromachined on-off optical switch is proposed with the techniques of silicon-glass wafer bonding and deep reactive ion etching. The micromechanical optical switch includes a slope anchor and a beam with a shutter, in which the beam is laterally driven by an electrostatic actuator. It is important to design and optimize the slope anchor to produce a large shutter displacement with low driving voltage. FEM simulation with ANSY 5.5 is made to analyze the dynamic behavior of the switch. Meanwhile, the pull-in voltage is achieved by using the solution of Intellisute 4.0, from that the frequency shift is obtained. The optimization offers a reasonable design for the optical switch array based on the present fabrication technology.

Published in:

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on  (Volume:2 )

Date of Conference:

22-25 Oct. 2001