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A compact serial RF MEMS switch for S-band application

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7 Author(s)
Hu Xiaodong ; Hebei Semicond. Res. Inst., Shijiazhuang, China ; Lumiao ; Hou Maohui ; He Qingguo
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This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.

Published in:

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on  (Volume:2 )

Date of Conference:

22-25 Oct. 2001