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Continued scaling of mainstream planar CMOS transistor technology into the deep-sub-100 nm regime is increasingly challenging but possible. In this paper, we report bulk-silicon planar CMOS transistors with the physical gate length scaled down to 15 nm. Gate delays (CV/I) of 0.29 ps for n-channel FET and 0.68 ps for p-channel FET are achieved at a supply voltage of 0.8 V. Energy-delay products are 42 pJ-ps/m for an n-channel FET and 97 pJ-ps/m for a p-channel FET, respectively. To our knowledge; these numbers are the best reported to date.
Date of Conference: 2-5 Dec. 2001