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80 nm poly-Si gate CMOS with HfO/sub 2/ gate dielectric

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21 Author(s)
Hobbs, C. ; Digital DNA Labs., Motorola Inc., Austin, TX, USA ; Tseng, H. ; Reid, K. ; Taylor, B.
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We report here for the first time the formation of an amorphous oxide layer between the polysilicon gate and hafnium oxide (HfO/sub 2/) gate dielectric due to a lateral oxidation mechanism at the gate edge. Using a polySi reoxidation-free CMOS process, well behaved 80 nm MOSFETs were fabricated with no evidence of lateral oxidation. A CETinv of 25 /spl Aring/ with a leakage current 1000/spl times/ lower than SiO/sub 2/ was obtained for a 30 /spl Aring/ HfO/sub 2//12 /spl Aring/ interfacial oxide stack. In this paper, we present results on the physical and electrical characterization.

Published in:

Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International

Date of Conference:

2-5 Dec. 2001

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