70 nm SOI-CMOS of 135 GHz f/sub max/ with dual offset-implanted source-drain extension structure for RF/analog and logic applications

We achieved 135 GHz f/sub max/ and 10.98 dB MSG at 40 GHz, which represent the world record data in CMOS published papers, by using a 70 nm body-tied partially-depleted (PD) SOI-CMOS with offset-implanted source-drain extension (SDE) and thick cobalt salicide. The suppression of V/sub th/ variations was also realized due to this structure. Dual offset-implanted SDE structure was proposed to realize high performance of both RF/analog and logic applications. We found that the optimized offset gate spacer width of the RF/analog parts is different from that of the logic parts.