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A study of TiO2, BaO and SrO thin films deposited by electrostatic spray assisted MOCVD

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6 Author(s)
Young-Seop Lee ; Sch. of Mater. Sci. & Metall. Eng., Ulsan Univ., South Korea ; Yong-Gyun Park ; Tae-Soo Lee ; Sung-Jae Lee
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In this study, the electrostatic spray assisted ESA-MOCVD is found to have the advantages of simple apparatus without gas lines, easy control of nano-sized droplets by applied voltage and solution rates, and easy control of thin film compositions by controlling the starting solution composition. The effect of deposition parameters on the growth behavior of TiO2 thin films such as substrate temperature, deposition time, applied voltage, oxygen rates, and annealing effect were investigated. The microstructure, composition and roughness were characterized by SEM, XPS and AFM, respectively. XRD was used to determine crystallization. Finally, we found how to adjust to deposit BaO and SrO thin films by ESA-MOCVD

Published in:

Science and Technology, 2001. KORUS '01. Proceedings. The Fifth Russian-Korean International Symposium on  (Volume:3 )

Date of Conference:

26 Jun-3 Jul 2001

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