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The influence of Ge-profile design on SiGe HBT linearity-harmonic distortion has been quantified using finite element physical device simulation. It was demonstrated that proper Ge-profile tailoring allows the linearity to be improved for both low- and high-current operation. High injection heterojunction barrier effects are shown to have a significant influence on the higher order harmonics. The influence of the Ge-profile design on linearity was found to be comparable to the influence from the epitaxial collector doping profile.