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Characteristic impedance extraction using calibration comparison

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5 Author(s)
Vandenberghe, S. ; Dept. of Electronics, Systems, Automation, & Technol., Katholieke Univ., Leuven, Belgium ; Schreurs, D.M.M. ; Carchon, G. ; Nauwelaers, B.K.J.C.
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A robust line impedance identification method is presented in this paper. It determines the characteristic impedance of on-wafer thru-line-reflect (TLR) standards measured after an initial off-wafer line-reflect-match or TLR calibration. The only assumption made is that the obtained trans-wafer error boxes are a cascade of a symmetric probe-related disturbance and a change in reference impedance. The proposed method yields an unbiased estimate of the complex characteristic impedance. Results from coplanar lines on a medium resistivity silicon substrate support the made assumption

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Microwave Theory and Techniques, IEEE Transactions on  (Volume:49 ,  Issue: 12 )