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Micromachined probe for high density data storage

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4 Author(s)
Ono, T. ; Fac. of Eng., Tohoku Univ., Sendai, Japan ; Phan Ngoc Minh ; Dong-Weon Lee ; Esashi, M.

Near-field aperture probes with high optical transmittance efficiency for optical recording and multi-probes with a metal wire as a heater for thermal recording are batch-fabricated by silicon micromachining. The aperture with diameter sizes from 10 to 500 nm at the apex of a SiO/sub 2/ tip on a Si cantilever is fabricated using a "Low temperature Oxidation & Selective Etching" technique. The SiO/sub 2/ tip is formed by nonuniform Si wet oxidation at 950/spl deg/C. The aperture is created at the apex of SiO/sub 2/ tip by selective etching SiO/sub 2/ in a buffered-HF. The aperture shows a high optical transmittance because the SiO/sub 2/ tip has a large opening angle. This fabrication technique is extended to fabricate a metal nanowire at the apex of the SiO/sub 2/ tip by embedding a metal into the aperture. By flowing a current into the metal wire, the tip can be heated. This probe array is fabricated, and the basic characteristics are evaluated.

Published in:

Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on  (Volume:2 )

Date of Conference:

15-19 July 2001

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