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RF MEMS switches and switch circuits

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2 Author(s)
Rebeiz, G.M. ; Michigan Univ., Ann Arbor, MI, USA ; Muldavin, Jeremy B.

MEMS switches are devices that use mechanical movement to achieve a short circuit or an open circuit in the RF transmission line. RF MEMS switches are the specific micromechanical switches that are designed to operate at RF-to-millimeter-wave frequencies (0.1 to 100 GHz). The forces required for the mechanical movement can be obtained using electrostatic, magnetostatic, piezoelectric, or thermal designs. To date, only electrostatic-type switches have been demonstrated at 0.1-100 GHz with high reliability (100 million to 10 billion cycles) and wafer-scale manufacturing techniques. It is for this reason that this article will concentrate on electrostatic switches

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Microwave Magazine, IEEE  (Volume:2 ,  Issue: 4 )