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Effects of mirror surface deformation in optical delay lines based on resonant-scanning micromirrors

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5 Author(s)
Cornett, K.T. ; Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA ; Walker, B. ; Carr, E.J. ; Heritage, J.P.
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We report on measurements of the static deformation of a micromirror and show that the mirror shape is responsible for the observed asymmetric broadening of the delayed pulse. The scanning time delay is produced by a Michelson interferometer

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Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE  (Volume:2 )

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