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A physical and chemical study of ArF laser irradiation on polycarbonate surface

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3 Author(s)

This work describes a physical and chemical study on polycarbonate surface irradiated by ArF (193 nm) excimer laser. The profile of the polymer surface under different UV energy densities due to photoablation has been studied

Published in:

Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE  (Volume:2 )

Date of Conference:

2001

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