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Relationship between sensitivity and waveguide position on diaphragm for silicon-based integrated optic pressure sensor

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6 Author(s)
Yamada, A. ; Fac. of Eng., Niigata Univ., Japan ; Shirai, Y. ; Goto, T. ; Ohkawa, M.
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We have experimentally investigated how sensitivity is dependent on the position of a waveguide passing over a diaphragm in a silicon-based integrated optic pressure sensor based on the elasto-optic effect

Published in:
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on  (Volume:1 )

Date of Conference: 2001

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