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Simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides

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1 Author(s)
Pavelescu, L. ; Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania

In this work, simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides are derived. In principle, the analysed sensors are made of a striploaded Mach-Zehnder interferometer (MZI), which is placed on a micromachined rectangular silicon membrane as a pressure sensitive element. Analysis and simulation of optomechanical effects including both photoelastic transduction principles and the photonic transport are performed

Published in:

Semiconductor Conference, 2001. CAS 2001 Proceedings. International  (Volume:1 )

Date of Conference:

2001