Referenced Items are not available for this document.
In this work, simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides are derived. In principle, the analysed sensors are made of a striploaded Mach-Zehnder interferometer (MZI), which is placed on a micromachined rectangular silicon membrane as a pressure sensitive element. Analysis and simulation of optomechanical effects including both photoelastic transduction principles and the photonic transport are performed
Published in:
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
(Volume:1
)
Date of Conference: 2001
- Page(s):
- 201 - 204 vol.1
- Meeting Date :
- 09 Oct 2001-13 Oct 2001
- Print ISBN:
- 0-7803-6666-2
- INSPEC Accession Number:
- 7211462
- Conference Location :
- Sinaia
- Digital Object Identifier :
- 10.1109/SMICND.2001.967446
- Product Type:
- Conference Publications
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